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Used Lam Research ASSY,UPPER FRAME,JETSTREAM

Lam Research ASSY,UPPER FRAME,JETSTREAM

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Product Description

ASSY,UPPER FRAME,JETSTREAM

PN: 571-082521-23387

FRAME CORE: 853-082522-202

FIB CORE: 853-082544-401


UFA/FIB P&ID: 251-072810-111

FIB INTERCONNECT DIAGRAM: 224-072810-401

SYSTEM INTERCONNECT: 224-089249-401

MAXIMUM INLET PRESSURE: 150 PSIG


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