Worldwide Shipping Southeast Asia, Europe, North America, etc.

230,000+ unique items.

90-day returns for quality issues only

No extra fees.

English

Home / Products/RF/RF Generator/MKS/Used MKS EDGE 1513A RF Power Generator, 1.5KW, 13.56MHz

Used MKS EDGE 1513A RF Power Generator, 1.5KW, 13.56MHz

PART NO.: EDGE 1513A-17045
Manufacturer:	MKS
Model:	EDGE 1513A
Condition:	Used
PRICE:	$9,600.00

Next Product Inquire Now Request For Quote

Product Description

MKS Model: EDGE 1513A

MKS PN: EDGE 1513A-17045

Weight: 13.3kg(25 lbs)

AC IN: 3~/PE 200-208V

50-60Hz 25A

RF OUTPUT: 1.5KW, 13.56MHz

Category

Semiconductor Equipment
- Applied Materials
- Lam Research
- TEL
- Varian
- KLA
- HITACHI
- Axcelis
- SCREEN
- ECI
- FEI
- MATTSON
Robot
- Brooks
- YASKAWA
- ABB
- Kawasaki
Semiconductor Pumps
Motor
RF
Vacuum Gauge
- MKS
- Inficon
- Edwards
Mass Flow Controllers/MFC
- MKS
- HORIBA
- Brooks
Vacuum Valves
- VAT
- MKS
- SMC
- V-Tex
- Edwards
- Nor-Cal
Chiller
- SMC
Spare Parts
GAS BOX
- Lam Research

OTHER PRODUCTS

Used TOKYO ELECTRON/TEL Tactras TAC-3WWZZZW Etch

Manufacturer:

TEL

Model:

TAC-3WWZZZW

Condition:

Used

Price:

$ 1

Used CRYO-6 Compressor

Manufacturer:

Model:

CRYO-6

Condition:

Used

Price:

$ 2500

Used TEL Trias EX2 300mm CVD

Manufacturer:

TEL

Model:

Trias EX2

Condition:

Used

Price:

$ 999

Used SHINWA LCH-40-1ZB-E-00 Chiller

Manufacturer:

SHINWA

Model:

LCH-40-1ZB-E-00

Condition:

Used

Price:

$ 1

Used AMAT MKS CDN396R PCB

Manufacturer:

MKS

Model:

CDN396R

Condition:

Used

Price:

$ 1

USED BROOKS AUTOMATION SERIES 8 ROBOT CONTROLLER 146844

Manufacturer:

BROOKS

Model:

146844

Condition:

Used

Price:

$ 1

Used MKS LIQUOZON LoopO3 EWSD03 Ozone Generator

Manufacturer:

MKS

Model:

LIQUOZON LoopO3 II-15

Condition:

Used

Price:

$ 1

Used Lam Research LAM Used PN 65048-PH52-BMO1 Valve

Manufacturer:

Lam research

Model:

65048-PH52-BMO1

Condition:

Used

Price:

$ 999